Name: Brooks GF81 Mass Flow Controllers
Brand: PT. Indomultimeter Test Instrument
Availability: OutOfStock
Rating: 5 (1 reviews)

Brooks GF81 Mass Flow Controllers

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Rp.74.500.000

Brand: Brooks Instruments
Suku Cadang: GF081CXXC-055L0013-V1ASS5-XXXXAX-00C
Ketersediaan: 4 - 6 MINGGU
Update Terakhir: 28 Mar 2024

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Tags/penandaan: Aalborg , GFM , Mass Flow Meters

Description

The Brooks GF80 / GF81 Mass Flow Controllers feature corrosion-resistant Hastelloy C-22 sensors for durable, long-term operation. With under 1 second settling times and 1% of set point accuracy ensure that the GF80 / GF81 will provide reliable flow measurement or flow control in demanding gas flow applications. Both GF80 and GF81 achieve excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes. With a wide range of digital and analog I/O options available, the GF80 / GF81 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.

Applications for the GF80 / GF81 Flow Controllers include:

Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
MOCVD for LED and power device manufacturing
Solar/thin film chemical vapor deposition (CVD) systems
Analytical OEM equipment

Features:

Metal sealed flow controllers and meters
Flow ranges:
- GF80: 3 sccm to 55 slm
- GF81: 51 to 300 slm
±1% flow accuracy
Corrosion-resistant hastelloy C-22 sensor
Adaptable mechanical configurations
RS485, DeviceNet & Profibus communication options
Less than ±0.5% stability
Solenoid control valve
Slimline body with VCR fittings

What's In The Box:

(1) User Manual

Brochure/Datasheet

Instruction manual

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Brooks GF81 Mass Flow Controllers

PT. Indomultimeter Test Instruments